Effective electrical passivation of Ge(100) for HfO2 gate dielectric layers using O2 plasma

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Authors

Xie, Qi; Deduytsche, Davy; Schaekers, Marc; Caymax, Matty; Delabie, Annelies; Qu, Xin-Ping; Detavernier, Christophe

ISSN

1099-0062

Issue

5

Journal

Electrochemical and Solid-State Letters

Volume

14

Title

Effective electrical passivation of Ge(100) for HfO2 gate dielectric layers using O2 plasma

Publication type

Journal article

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