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Vertically-aligned carbon nanotube growth in high aspect ratio through-silicon vias

dc.contributor.authorXie, Rongsi
dc.contributor.authorFeng, Yan
dc.contributor.authorCan, Zhang
dc.contributor.authorGuofang, Zhang
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorJohn, Robertson
dc.date.accessioned2021-10-19T21:57:01Z
dc.date.available2021-10-19T21:57:01Z
dc.date.issued2011-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20164
dc.sourceIIOimport
dc.titleVertically-aligned carbon nanotube growth in high aspect ratio through-silicon vias
dc.typeMeeting abstract
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.source.peerreviewno
dc.source.beginpageP2.99
dc.source.conference22nd European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes and Nitrides
dc.source.conferencedate4/09/2011
dc.source.conferencelocationGarmisch-Partenkirchen Germany
dc.identifier.urlhttp://www.diamond-conference.elsevier.com/resources/downloads/Diamond2011-PosterProgram.pdf
imec.availabilityPublished - imec


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