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Wafer-level thin film vacuum packages for MEMS using nanoporous anodic alumina membranes
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Authors
Zekry, Joseph
;
Sabuncuoglu Tezcan, Deniz
;
Celis, Jean-Pierre
;
Puers, Bob
;
Van Hoof, Chris
;
Tilmans, Harrie
Conference
16th International Conference on Solid-State Sensors, Actuators and Microsystems - Transducers
Title
Wafer-level thin film vacuum packages for MEMS using nanoporous anodic alumina membranes
Publication type
Proceedings paper
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