dc.contributor.author | Zekry, Joseph | |
dc.contributor.author | Sabuncuoglu Tezcan, Deniz | |
dc.contributor.author | Celis, Jean-Pierre | |
dc.contributor.author | Puers, Bob | |
dc.contributor.author | Van Hoof, Chris | |
dc.contributor.author | Tilmans, Harrie | |
dc.date.accessioned | 2021-10-19T22:12:12Z | |
dc.date.available | 2021-10-19T22:12:12Z | |
dc.date.issued | 2011-06 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20193 | |
dc.source | IIOimport | |
dc.title | Wafer-level thin film vacuum packages for MEMS using nanoporous anodic alumina membranes | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Sabuncuoglu Tezcan, Deniz | |
dc.contributor.imecauthor | Puers, Bob | |
dc.contributor.imecauthor | Van Hoof, Chris | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.orcidimec | Sabuncuoglu Tezcan, Deniz::0000-0002-9237-7862 | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.source.peerreview | no | |
dc.source.beginpage | 974 | |
dc.source.endpage | 977 | |
dc.source.conference | 16th International Conference on Solid-State Sensors, Actuators and Microsystems - Transducers | |
dc.source.conferencedate | 5/06/2011 | |
dc.source.conferencelocation | Beijing China | |
imec.availability | Published - imec | |