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Novel approach to conformal FINFET extension doping
Publication:
Novel approach to conformal FINFET extension doping
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Date
2011
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Zschaetzsch, Gerd
;
Hoffmann, Thomas Y.
;
Horiguchi, Naoto
;
Hautala, Y.
;
Shao, Y.
;
Vandervorst, Wilfried
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1924
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Acq. date: 2025-12-10
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Views
1924
since deposited on 2021-10-19
1
last month
1
last week
Acq. date: 2025-12-10
Citations