Atomic layer deposition of tantalum oxide and tantalum silicate from chloride precursors

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Authors

Adelmann, Christoph; Delabie, Annelies; Schepers, Bart; Rodriguez, Leonard; Franquet, Alexis; Conard, Thierry; Opsomer, Karl; Vaesen, Inge; Moussa, Alain; Pourtois, Geoffrey; Pierloot, Christine; Caymax, Matty; Van Elshocht, Sven

ISSN

0948-1907

Issue

7_9

Journal

Chemical Vapor Deposition

Volume

18

Title

Atomic layer deposition of tantalum oxide and tantalum silicate from chloride precursors

Publication type

Journal article

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