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In-situ studies of the chemistry of trimethyl-aluminum on III-V semiconductor surfaces

dc.contributor.authorAdelmann, Christoph
dc.contributor.authorTallarida, Massimo
dc.contributor.authorCuypers, Daniel
dc.contributor.authorRodriguez, Leonard
dc.contributor.authorMichling, Marcel
dc.contributor.authorFriedrich, Daniel
dc.contributor.authorDe Clercq, Astrid
dc.contributor.authorDelabie, Annelies
dc.contributor.authorConard, Thierry
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorLocquet, Jean-Pierre
dc.contributor.authorSchmeisser, Dieter
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-20T10:00:54Z
dc.date.available2021-10-20T10:00:54Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20257
dc.sourceIIOimport
dc.titleIn-situ studies of the chemistry of trimethyl-aluminum on III-V semiconductor surfaces
dc.typeMeeting abstract
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewno
dc.source.conference39th Conference on the Physics and Chemistry of Surfaces and Interfaces - PCSI
dc.source.conferencedate22/01/2012
dc.source.conferencelocationSanta Fe, NM USA
imec.availabilityPublished - imec


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