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Electroless copper deposition on TiN
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Authors
Min, Woo Sig
;
Palmans, Roger
;
Maex, Karen
;
Lee, D. N.
Conference
1997 Joint International Meeting ECS (Electrochemical Society) and ISE (International Society of Electrochemistry) : Symposium o
Title
Electroless copper deposition on TiN
Publication type
Oral presentation
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