Show simple item record

Electroless copper deposition on TiN

dc.contributor.authorMin, Woo Sig
dc.contributor.authorPalmans, Roger
dc.contributor.authorMaex, Karen
dc.contributor.authorLee, D. N.
dc.date.accessioned2021-09-30T09:18:30Z
dc.date.available2021-09-30T09:18:30Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2026
dc.sourceIIOimport
dc.titleElectroless copper deposition on TiN
dc.typeOral presentation
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.conference1997 Joint International Meeting ECS (Electrochemical Society) and ISE (International Society of Electrochemistry) : Symposium o
dc.source.conferencelocation
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record