Characterizing oxide traps in the InGaAs/Al2O3 system with sulfur passivation

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Authors
Alian, AliReza; Brammertz, Guy; Degraeve, Robin; Cho, Moon Ju; Caymax, Matty; De Meyer, Kristin; Heyns, Marc
Conference
IEEE Semiconductor Interface Specialists Conferennce - SISC
Title
Characterizing oxide traps in the InGaAs/Al2O3 system with sulfur passivation
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Meeting abstract
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