Publication:

Al-induced defect generation in cubic phase HfO2/SiO2/Si gate stacks

Date

2012
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Author(s)

Arimura, Hiroaki  
;
Ragnarsson, Lars-Ake  
;
Veloso, Anabela  
;
Adelmann, Christoph  
;
Degraeve, Robin  
;
Schram, Tom  
;
Chew, Soon Aik
;
Franco, Jacopo  
;
Cho, Moon Ju
;
Kaczer, Ben  
;
Groeseneken, Guido  
;
Horiguchi, Naoto  
;
Thean, Aaron  

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