Publication:

Al-induced defect generation in cubic phase HfO2/SiO2/Si gate stacks

Date

2012

Meeting abstract

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Author(s)

Arimura, Hiroaki

;

Ragnarsson, Lars-Ake

;

Veloso, Anabela

;

Adelmann, Christoph

;

Degraeve, Robin

;

;

;

;

;

;

Groeseneken, Guido

;

Horiguchi, Naoto

;

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Acq. date: 2026-10-12