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Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS

dc.contributor.authorArmini, Silvia
dc.contributor.authorCherman, Vladimir
dc.contributor.authorVolodin, Alexander
dc.contributor.authorLenci, Silvia
dc.contributor.authorPieri, Francesco
dc.contributor.authorWouters, Daan
dc.contributor.authorMoonens, Jos
dc.contributor.authorNeutens, Pieter
dc.contributor.authorDupre, Cecilia
dc.contributor.authorOllier, Eric
dc.contributor.authorTsuchiya, Yoshi
dc.contributor.authorMizuta, Hiroshi
dc.date.accessioned2021-10-20T10:02:30Z
dc.date.available2021-10-20T10:02:30Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20306
dc.sourceIIOimport
dc.titleSelective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS
dc.typeMeeting abstract
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorLenci, Silvia
dc.contributor.imecauthorNeutens, Pieter
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting Symposium B: Heterogeneous Integration Challenges of MEMS, Sensor, and CMOS LSI
dc.source.conferencedate9/04/2012
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access


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