Authors

Armini, Silvia; Cherman, Vladimir; Volodin, Alexander; Lenci, Silvia; Pieri, Francesco; Wouters, Daan; Moonens, Jos; Neutens, Pieter; Dupre, Cecilia; Ollier, Eric; Tsuchiya, Yoshi; Mizuta, Hiroshi

Conference

MRS Spring Meeting Symposium B: Heterogeneous Integration Challenges of MEMS, Sensor, and CMOS LSI

Title

Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS

Publication type

Meeting abstract

Embargo date

9999-12-31