Publication:
Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1892 since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations
Metrics
Views
1892 since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations