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Substrate off-angle effects on P-doping of (110)-oriented CVD diamond films

dc.contributor.authorBalasubramaniam, Y.
dc.contributor.authorD'Haen, Jan
dc.contributor.authorSoltani, A.
dc.contributor.authorJanssens, S.D.
dc.contributor.authorHaenen, Ken
dc.date.accessioned2021-10-20T10:04:29Z
dc.date.available2021-10-20T10:04:29Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20340
dc.sourceIIOimport
dc.titleSubstrate off-angle effects on P-doping of (110)-oriented CVD diamond films
dc.typeOral presentation
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.source.peerreviewno
dc.source.conference63rd Diamond Conference
dc.source.conferencedate9/07/2012
dc.source.conferencelocationWarwick UK
imec.availabilityPublished - imec


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