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Electrical, thermal and mechanical impact of 3D TSV and 3D stacking technology on advanced CMOS devices – Technology directions

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1787 since deposited on 2021-10-20
1last month
Acq. date: 2026-05-20

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1787 since deposited on 2021-10-20
1last month
Acq. date: 2026-05-20

Citations