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Optimized design and placement of piezoelectric transducers for micromechanical structures subject to membrane stress

dc.contributor.authorBrondani Torri, Guilherme
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorKarabacak, Devrez
dc.contributor.authorVandecasteele, Marianne
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-20T10:09:03Z
dc.date.available2021-10-20T10:09:03Z
dc.date.issued2012-04
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20393
dc.sourceIIOimport
dc.titleOptimized design and placement of piezoelectric transducers for micromechanical structures subject to membrane stress
dc.typeProceedings paper
dc.contributor.imecauthorBrondani Torri, Guilherme
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecBrondani Torri, Guilherme::0000-0002-5450-658X
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1-Aug
dc.source.endpage8-Aug
dc.source.conference13th Int. Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics - EuroSimE
dc.source.conferencedate16/04/2012
dc.source.conferencelocationCascais Portugal
dc.identifier.urlhttp://dx.doi.org/10.1109/ESimE.2012.6191753
imec.availabilityPublished - open access


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