Authors

Bury, Erik; Kaczer, Ben; Toledano Luque, Maria; Arimura, Hiroaki; Ragnarsson, Lars-Ake; Veloso, Anabela; Chew, Soon Aik; Togo, Mitsuhiro; Schram, Tom; Groeseneken, Guido

Conference

43rd IEEE Semiconductor Interface Specialists Conference - SISC

Title

Reliability in gate first and gate last Ultra-Thin-EOT gate stacks assessed with CV-eMSM BTI characterization

Publication type

Meeting abstract