Authors

Carbonell, Laure; Caluwaerts, Rudy; Heylen, Nancy; Volders, Henny; Kellens, Kristof; Tokei, Zsolt; Takada, S; Ban, N; Ishimoto, T; Suzuki, N.; Umehara, S.

Conference

Hitachi High Technologies CTE Symposium

Title

Development of a SEM based methodology for the detection of sub-surface voids in nano-interconnects

Publication type

Meeting abstract