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Development of a SEM based methodology for the detection of sub-surface voids in nano-interconnects

dc.contributor.authorCarbonell, Laure
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorHeylen, Nancy
dc.contributor.authorVolders, Henny
dc.contributor.authorKellens, Kristof
dc.contributor.authorTokei, Zsolt
dc.contributor.authorTakada, S
dc.contributor.authorBan, N
dc.contributor.authorIshimoto, T
dc.contributor.authorSuzuki, N.
dc.contributor.authorUmehara, S.
dc.date.accessioned2021-10-20T10:11:52Z
dc.date.available2021-10-20T10:11:52Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20418
dc.sourceIIOimport
dc.titleDevelopment of a SEM based methodology for the detection of sub-surface voids in nano-interconnects
dc.typeMeeting abstract
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorTokei, Zsolt
dc.source.peerreviewno
dc.source.beginpage1
dc.source.endpage1
dc.source.conferenceHitachi High Technologies CTE Symposium
dc.source.conferencedate5/12/2012
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


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