Through-silicon via technology for three-dimensional integrated circuit manufacturing

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Authors
Civale, Yann; Redolfi, Augusto; Jaenen, Patrick; Kostermans, Maarten; Van Besien, Els; Mertens, Sofie; Witters, Thomas; Jourdan, Nicolas; Armini, Silvia; Vandersmissen, Kevin; Philipsen, Harold; Verdonck, Patrick; Heylen, Nancy; Nolmans, Philip; Li, Yunlong; Croes, Kristof; Beyer, Gerald; Swinnen, Bart; Beyne, Eric
Conference
35th International Electronics Manufacturing Technology Conference - IEMT
Title
Through-silicon via technology for three-dimensional integrated circuit manufacturing
Publication type
Proceedings paper
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