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Through-silicon via technology for three-dimensional integrated circuit manufacturing

dc.contributor.authorCivale, Yann
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorJaenen, Patrick
dc.contributor.authorKostermans, Maarten
dc.contributor.authorVan Besien, Els
dc.contributor.authorMertens, Sofie
dc.contributor.authorWitters, Thomas
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorArmini, Silvia
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorHeylen, Nancy
dc.contributor.authorNolmans, Philip
dc.contributor.authorLi, Yunlong
dc.contributor.authorCroes, Kristof
dc.contributor.authorBeyer, Gerald
dc.contributor.authorSwinnen, Bart
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-20T10:18:49Z
dc.date.available2021-10-20T10:18:49Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20468
dc.sourceIIOimport
dc.titleThrough-silicon via technology for three-dimensional integrated circuit manufacturing
dc.typeProceedings paper
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorJaenen, Patrick
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorMertens, Sofie
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorVandersmissen, Kevin
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorNolmans, Philip
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorSwinnen, Bart
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.contributor.orcidimecMertens, Sofie::0000-0002-1482-6730
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewyes
dc.source.conference35th International Electronics Manufacturing Technology Conference - IEMT
dc.source.conferencedate6/11/2012
dc.source.conferencelocationIpoh Malaysia
imec.availabilityPublished - imec


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