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Highly-conformal plasma-enhanced atomic-layer deposition silicon dioxide liner for high aspect-ratio through-silicon via 3D interconnections
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Authors
Civale, Yann
;
Redolfi, Augusto
;
Velenis, Dimitrios
;
Heylen, Nancy
;
Beynet, Julien
;
Jung, Insoo
;
Woo, Jeong-Jun
;
Swinnen, Bart
;
Beyer, Gerald
;
Beyne, Eric
Conference
4th Electronics System Integration Technologies Conference - ESTC
Title
Highly-conformal plasma-enhanced atomic-layer deposition silicon dioxide liner for high aspect-ratio through-silicon via 3D interconnections
Publication type
Proceedings paper
Embargo date
9999-12-31
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