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Advanced characterization of carrier profiles in germanium using micro-machined contact probes

dc.contributor.authorClarysse, Trudo
dc.contributor.authorKonttinen, Mikko
dc.contributor.authorParmentier, Brigitte
dc.contributor.authorMoussa, Alain
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorImpellizzeri, Giuliana
dc.contributor.authorNapolitani, Enrico
dc.contributor.authorPrivitera, Vittorio
dc.contributor.authorNielsen, Peter F.
dc.contributor.authorPetersen, Dirch H.
dc.contributor.authorHansen, Ole
dc.date.accessioned2021-10-20T10:20:20Z
dc.date.available2021-10-20T10:20:20Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20478
dc.sourceIIOimport
dc.titleAdvanced characterization of carrier profiles in germanium using micro-machined contact probes
dc.typeProceedings paper
dc.contributor.imecauthorParmentier, Brigitte
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewyes
dc.source.beginpage167
dc.source.endpage170
dc.source.conferenceIon Implantation Technology. Proceedings of the 19th International Conference
dc.source.conferencedate25/06/2012
dc.source.conferencelocationValladolid Spain
imec.availabilityPublished - imec
imec.internalnotesAIP Conference Proceedings; Vol. 1496


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