dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Cherman, Vladimir | |
dc.contributor.author | Li, Yunlong | |
dc.contributor.author | Zhao, Larry | |
dc.contributor.author | Barbarin, Yohan | |
dc.contributor.author | De Messemaeker, Joke | |
dc.contributor.author | Civale, Yann | |
dc.contributor.author | Velenis, Dimitrios | |
dc.contributor.author | Stucchi, Michele | |
dc.contributor.author | Kauerauf, Thomas | |
dc.contributor.author | Redolfi, Augusto | |
dc.contributor.author | Dimcic, Biljana | |
dc.contributor.author | Ivankovic, Andrej | |
dc.contributor.author | Van der Plas, Geert | |
dc.contributor.author | De Wolf, Ingrid | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | Swinnen, Bart | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Beyne, Eric | |
dc.date.accessioned | 2021-10-20T10:25:38Z | |
dc.date.available | 2021-10-20T10:25:38Z | |
dc.date.issued | 2012-07 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20511 | |
dc.source | IIOimport | |
dc.title | Reliability concerns in copper TSV's: methods and results | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Cherman, Vladimir | |
dc.contributor.imecauthor | Li, Yunlong | |
dc.contributor.imecauthor | De Messemaeker, Joke | |
dc.contributor.imecauthor | Velenis, Dimitrios | |
dc.contributor.imecauthor | Stucchi, Michele | |
dc.contributor.imecauthor | Redolfi, Augusto | |
dc.contributor.imecauthor | Van der Plas, Geert | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.contributor.imecauthor | Swinnen, Bart | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.contributor.orcidimec | Li, Yunlong::0000-0003-4791-4013 | |
dc.contributor.orcidimec | Van der Plas, Geert::0000-0002-4975-6672 | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.contributor.orcidimec | Cherman, Vladimir::0000-0002-8068-9236 | |
dc.contributor.orcidimec | De Messemaeker, Joke::0000-0002-4872-0176 | |
dc.contributor.orcidimec | Swinnen, Bart::0000-0002-6878-7124 | |
dc.source.peerreview | yes | |
dc.source.conference | 19th International Symposium on the Physical & Failure Analysis of Integrated Circuits - IPFA | |
dc.source.conferencedate | 2/07/2012 | |
dc.source.conferencelocation | Singapore | |
imec.availability | Published - imec | |