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Reliability challenges during different phases of 3D SIC processing

dc.contributor.authorCroes, Kristof
dc.contributor.authorCivale, Yann
dc.contributor.authorLabie, Riet
dc.contributor.authorLi, Yunlong
dc.contributor.authorDe Messemaeker, Joke
dc.contributor.authorVanstreels, Kris
dc.contributor.authorRedolfi, Augusto
dc.contributor.authorVelenis, Dimitrios
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorVan De Peer, Myriam
dc.contributor.authorCherman, Vladimir
dc.contributor.authorVandevelde, Bart
dc.contributor.authorBeyne, Eric
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-20T10:25:50Z
dc.date.available2021-10-20T10:25:50Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20512
dc.sourceIIOimport
dc.titleReliability challenges during different phases of 3D SIC processing
dc.typeMeeting abstract
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorLabie, Riet
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorDe Messemaeker, Joke
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorRedolfi, Augusto
dc.contributor.imecauthorVelenis, Dimitrios
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorVan De Peer, Myriam
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecLabie, Riet::0000-0002-1401-1291
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpageI1-01
dc.source.conferenceWorkshop Materials for Advanced Matalization - MAM
dc.source.conferencedate11/03/2012
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - imec


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