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Conference contributions
Advanced CMOS manufacturing, a drive for plasma science and technology
Publication:
Advanced CMOS manufacturing, a drive for plasma science and technology
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Date
2012
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
de Marneffe, Jean-Francois
;
Altamirano Sanchez, Efrain
;
Milenin, Alexey
;
Samara, Vladimir
;
Boullart, Werner
;
Baklanov, Mikhaïl
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1942
since deposited on 2021-10-20
1
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1942
since deposited on 2021-10-20
1
last month
Acq. date: 2025-12-10
Citations