Publication:
Roughness mitigation at sub-30nm semiconductor patterns: the effect of H2/Ar plasma
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1897 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-01-10
Citations
Metrics
Views
1897 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-01-10
Citations