Publication:
Reactions mechanisms in Al2O3 atomic layer deposition studied by density functional theory
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1906 since deposited on 2021-10-20
3last month
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Acq. date: 2026-08-11
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Statistics
Views
1906 since deposited on 2021-10-20
3last month
2last week
Acq. date: 2026-08-11
Citations