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Reactions mechanisms in Al2O3 atomic layer deposition studied by density functional theory

dc.contributor.authorDelabie, Annelies
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorSioncke, Sonja
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorPierloot, Christine
dc.date.accessioned2021-10-20T10:38:25Z
dc.date.available2021-10-20T10:38:25Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20581
dc.sourceIIOimport
dc.titleReactions mechanisms in Al2O3 atomic layer deposition studied by density functional theory
dc.typeProceedings paper
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorPierloot, Christine
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.conferenceALD Conference
dc.source.conferencedate17/06/2012
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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