Authors

Delabie, Annelies; Sioncke, Sonja; Rip, Jens; Van Elshocht, Sven; Pourtois, Geoffrey; Mueller, Matthias; Beckhoff, Burkhard; Pierloot, Kristine

ISSN

0734-2101

Issue

1

Journal

Journal of Vacuum Science and Technology A

Volume

30

Title

Reaction mechanisms for atomic layer deposition of aluminum oxide on semiconductor substrates

Publication type

Journal article