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Localised Strain Characterization in Semiconductor Structures using Electron Diffraction Contrast Imaging

dc.contributor.authorJanssens, Koenraad
dc.contributor.authorVan der Biest, O.
dc.contributor.authorVanhellemont, Jan
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-09-29T12:42:25Z
dc.date.available2021-09-29T12:42:25Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/205
dc.sourceIIOimport
dc.titleLocalised Strain Characterization in Semiconductor Structures using Electron Diffraction Contrast Imaging
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage90
dc.source.endpage91
dc.source.conferenceJoint Meeting of the Belgian and Dutch Societies for Electron Microscopy; December 1-2, 1994; Arnhem, The Netherlands.
imec.availabilityPublished - imec


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