Authors

Janssens, Koenraad; Van der Biest, O.; Vanhellemont, Jan; Maes, Herman

Conference

Joint Meeting of the Belgian and Dutch Societies for Electron Microscopy; December 1-2, 1994; Arnhem, The Netherlands.

Title

Localised Strain Characterization in Semiconductor Structures using Electron Diffraction Contrast Imaging

Publication type

Proceedings paper