Publication:
Localised Strain Characterization in Semiconductor Structures using Electron Diffraction Contrast Imaging
Date
| dc.contributor.author | Janssens, Koenraad | |
| dc.contributor.author | Van der Biest, O. | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.contributor.author | Maes, Herman | |
| dc.date.accessioned | 2021-09-29T12:42:25Z | |
| dc.date.available | 2021-09-29T12:42:25Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/205 | |
| dc.source.beginpage | 90 | |
| dc.source.conference | Joint Meeting of the Belgian and Dutch Societies for Electron Microscopy; December 1-2, 1994; Arnhem, The Netherlands. | |
| dc.source.endpage | 91 | |
| dc.title | Localised Strain Characterization in Semiconductor Structures using Electron Diffraction Contrast Imaging | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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