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Localised Strain Characterization in Semiconductor Structures using Electron Diffraction Contrast Imaging
Publication:
Localised Strain Characterization in Semiconductor Structures using Electron Diffraction Contrast Imaging
Date
1994
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Janssens, Koenraad
;
Van der Biest, O.
;
Vanhellemont, Jan
;
Maes, Herman
Journal
Abstract
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2049
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations
Metrics
Views
2049
since deposited on 2021-09-29
Acq. date: 2025-10-23
Citations