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Control of texture and oxygen stoichiometry in reactively sputtered RuO2 electrode layers for low fatigue PZT FECAPs

dc.contributor.authorNorga, Gerd
dc.contributor.authorWouters, Dirk
dc.contributor.authorConard, Thierry
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-09-30T09:21:27Z
dc.date.available2021-09-30T09:21:27Z
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2061
dc.sourceIIOimport
dc.titleControl of texture and oxygen stoichiometry in reactively sputtered RuO2 electrode layers for low fatigue PZT FECAPs
dc.typeOral presentation
dc.contributor.imecauthorConard, Thierry
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewno
dc.source.conferenceCOST 514 Workshop on Ferroelectric Thin Films
dc.source.conferencedate14/04/1997
dc.source.conferencelocationParma Italy
imec.availabilityPublished - imec


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