Authors

Eneman, Geert; Witters, Liesbeth; Collaert, Nadine; Mitard, Jerome; Hellings, Geert; Yamaguchi, Shinpei; De Keersgieter, An; Hikavyy, Andriy; Vincent, Benjamin; Favia, Paola; Bender, Hugo; Veloso, Anabela; Chiarella, Thomas; Togo, Mitsuhiro; Loo, Roger; De Meyer, Kristin; Mercha, Abdelkarim; Horiguchi, Naoto; Thean, Aaron

Conference

Dielectrics for Nanosystems 5: Materials Science, Processing, Reliability, and Manufacturing -and- Tutorials in Nanotechnology

Title

Stress techniques in advanced transistor architectures: bulk FinFETs and implant-free quantum well transistors

Publication type

Proceedings paper

Embargo date

9999-12-31