Stress techniques and mobility enhancement in FinFET architectures

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Authors
Eneman, Geert; Witters, Liesbeth; Mitard, Jerome; Hellings, Geert; De Keersgieter, An; Brunco, David; Hikavyy, Andriy; Vincent, Benjamin; Simoen, Eddy; Favia, Paola; Bender, Hugo; Veloso, Anabela; Chiarella, Thomas; Boccardi, Guillaume; Kim, Min-Soo; Togo, Mitsuhiro; Loo, Roger; De Meyer, Kristin; Horiguchi, Naoto; Collaert, Nadine; Thean, Aaron
Conference
ECS Fall Meeting Symposium E17: SiGe, Ge, and Related Compounds
Title
Stress techniques and mobility enhancement in FinFET architectures
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Meeting abstract
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