Authors

Franquet, Alexis; Conard, Thierry; Gilbert, Matthieu; Douhard, Bastien; Vandervorst, Wilfried

Conference

SIMS Europe: 8th European Workshop on Secondary Ion Mass Spectrometry

Title

Thin SiGe films in narrow structures: comparison of different analysis techniques for the thickness and composition measurements

Publication type

Meeting abstract

Embargo date

9999-12-31