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GIDL behavior of p- and n-MuGFET devices with different TiN metal gate thickness and high-k gate dielectrics
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Authors
Galeti, M.
;
Rodrigues, M.
;
Martino, J.A.
;
Collaert, Nadine
;
Simoen, Eddy
;
Claeys, Cor
ISSN
0038-1101
Issue
1
Journal
Solid-State Electronics
Volume
70
Title
GIDL behavior of p- and n-MuGFET devices with different TiN metal gate thickness and high-k gate dielectrics
Publication type
Journal article
Embargo date
9999-12-31
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