Aqueous chemical solution deposition of LuFeO3 thin high-k films

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Authors
Gielis, Sven; Peys, Nick; Dewulf, D.; Pavlovic, N.; Van Elshocht, Sven; De Gendt, Stefan; Hardy, An; Van Bael, Marlies
Conference
514th WE-Heraeus Seminar
Title
Aqueous chemical solution deposition of LuFeO3 thin high-k films
Publication type
Oral presentation
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