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Aqueous chemical solution deposition of LuFeO3 thin high-k films

dc.contributor.authorGielis, Sven
dc.contributor.authorPeys, Nick
dc.contributor.authorDewulf, D.
dc.contributor.authorPavlovic, N.
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHardy, An
dc.contributor.authorVan Bael, Marlies
dc.date.accessioned2021-10-20T11:11:50Z
dc.date.available2021-10-20T11:11:50Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20721
dc.sourceIIOimport
dc.titleAqueous chemical solution deposition of LuFeO3 thin high-k films
dc.typeOral presentation
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.source.peerreviewno
dc.source.conference514th WE-Heraeus Seminar
dc.source.conferencedate21/08/2012
dc.source.conferencelocationBad Honnef Germany
imec.availabilityPublished - imec


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