Show simple item record

Impact of UV cure time and wavelength on chemical, mechanical and electrical properties of PECVD deposited porous ultra low-k films

dc.contributor.authorGodavarthi, Srinivas
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorMardani, Shabnam
dc.contributor.authorVanstreels, Kris
dc.contributor.authorVan Besien, Els
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-20T11:12:36Z
dc.date.available2021-10-20T11:12:36Z
dc.date.issued2012-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20724
dc.sourceIIOimport
dc.titleImpact of UV cure time and wavelength on chemical, mechanical and electrical properties of PECVD deposited porous ultra low-k films
dc.typeMeeting abstract
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorVan Besien, Els
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageP3-05
dc.source.conferenceMaterials for Advanced Characterization - MAM
dc.source.conferencedate11/03/2012
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
24815.pdf
Size:
268.0Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record