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Publication:

Assessment of EUV resist performance for sub-22nm hp lines and 26nm hp contacts on NXE3100

Date

2012
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Author(s)

Goethals, Mieke
;
Van Roey, Frieda  
;
Hosokawa, Kohei
;
Hoefnagels, Rik  
;
Niroomand, Ardavan
;
Foubert, Philippe  

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