Publication:

Pore sealing of SiOCH ultra low-k dielectrics with polyimide Langmuir-Blodgett film

Date

2012

Proceedings Paper

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Author(s)

Goloudina, S.I.

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Sklizkova, V.P.

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Kudryavtsev, V.V.

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Baklanov, Mikhaïl

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1762 since deposited on 2021-10-20

Acq. date: 2026-02-25