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Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers

dc.contributor.authorGronheid, Roel
dc.contributor.authorSingh, Arjun
dc.contributor.authorChan, BT
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorNealey, Paul
dc.contributor.authorYounkin, Todd
dc.contributor.authorRomo Negreira, Ainhoa
dc.contributor.authorSomervell, Mark
dc.contributor.authorTahara, Shigeru
dc.contributor.authorNafus, Kathleen
dc.date.accessioned2021-10-20T11:21:44Z
dc.date.available2021-10-20T11:21:44Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20758
dc.sourceIIOimport
dc.titleContact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers
dc.typeOral presentation
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorSingh, Arjun
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorRomo Negreira, Ainhoa
dc.contributor.imecauthorNafus, Kathleen
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.source.peerreviewno
dc.source.conferenceMRS Fall M eeting Symposium S: Directed Self-Assembly for Nanopatterning
dc.source.conferencedate26/11/2012
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec


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