Publication:

Impact of through silicon via induced mechanical stress on fully depleted bulk FinFET technology

Date

2012
Proceedings Paper
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25220.pdf 3.01 MB

Author(s)

Guo, Wei  
;
Van der Plas, Geert  
;
Ivankovic, Andrej
;
Cherman, Vladimir  
;
Eneman, Geert  
;
De Wachter, Bart  
;
Togo, Mitsuhiro
;
Redolfi, Augusto  
;
Kubicek, Stefan  
;
Civale, Yann
;
Chiarella, Thomas  
;
Vandevelde, Bart  
;
Croes, Kristof  
;
De Wolf, Ingrid  
;
Debusschere, Ingrid  
;
Mercha, Abdelkarim  
;
Thean, Aaron  
;
Beyer, Gerald  
;
Swinnen, Bart  
;
Beyne, Eric  

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Abstract

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