In-line metrology and inspection for process control during 3D stacking of IC�s

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Authors
Halder, Sandip; De Wolf, Ingrid; Phommahaxay, Alain; Miller, Andy; Maenhoudt, Mireille; Beyer, Gerald; Swinnen, Bart; Beyne, Eric
Conference
IEEE International 3D System Integration Conference - 3DIC
Title
In-line metrology and inspection for process control during 3D stacking of IC�s
Publication type
Proceedings paper
Embargo date
9999-12-31
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