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Electroless copper bath stability monitoring with UV-VIS spectroscopy, pH, and mixed potential measurements
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Authors
Inoue, Fumihiro
;
Philipsen, Harold
;
Radisic, Alex
;
Armini, Silvia
;
Civale, Yann
;
Shingubara, Shoso
;
Leunissen, Peter
ISSN
0013-4651
Issue
7
Journal
Journal of the Electrochemical Society
Volume
159
Title
Electroless copper bath stability monitoring with UV-VIS spectroscopy, pH, and mixed potential measurements
Publication type
Journal article
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