Authors

Itocazu, V.T.; Sonnenberg, V.; Simoen, Eddy; Claeys, Cor; Martino, J.A.

Conference

Proceedings of the 27th Symposium on Microelectronics Technology and Devices - SBMicro

Title

Analysis of the silicon film thickness and the ground plane influence on ultra thin buried oxide SOI nMOSFETs

Publication type

Proceedings paper