Early resistance change and stress/electromigration modeling in aluminum interconnects

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Authors

Petrescu, Violeta; Mouthaan, A. J.; Schoenmaker, Wim

Issue

10_11

Journal

Microelectronics and Reliability

Volume

37

Title

Early resistance change and stress/electromigration modeling in aluminum interconnects

Publication type

Journal article

Embargo date

9999-12-31

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